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Deanship of Graduate Studies
Document Details
Document Type
:
Thesis
Document Title
:
STUDY OF THE STRUCTURE, MORPHOLOGY, AND OPTICAL PROPERTIES OF DOPED ZNO THIN FILMS
دراسة الخصائص التركيبية والضوئية لأغشية رقيقة من أكسيد الزنك المطعم
Subject
:
Faculty of Sciences
Document Language
:
Arabic
Abstract
:
Sm-doped ZnO and Al-doped ZnO thin films were deposited on Si wafers (111) using magnetron sputtering technique. 200W deposition power was applied to the ZnO target. Meanwhile, the dopant concentrations were controlled by applying increasing deposition powers from 20W up to 40W. During each run, ZnO and dopant were deposited simultaneously. Uniform and homogeneous thin films were synthesized. Doped ZnO crystal structure was studied using X-ray diffraction technique. No ZnO crystal structure distortion occurred even at the highest deposition power of the dopant. X-ray photoelectron spectroscopy (XPS) and x-ray fluorescence (XRF) techniques were employed to determine the elemental composition of Al-doped ZnO and Sm-doped ZnO thin films, respectively. Atomic force microscope (AFM) and high-resolution scanning electron microscope (HRSEM) were used to portray the thin film surface morphology, uniformity, roughness and thickness. Variable angle spectroscopic ellipsometry (VASE) was utilized to help optical characterization of the doped ZnO thin film composites. Effective medium approximation (EMA) was elected to help determine the constituents’ ratios. Thin film thickness, roughness, refractive index, extinction coefficient, resistivity, scattering time, mobility, effective mass of the charge carrier and charge carrier concentration were determined by fitting VASE data.
Supervisor
:
Dr. Walid Mahmoud Ahmed Al-Sherbini
Thesis Type
:
Master Thesis
Publishing Year
:
1439 AH
2018 AD
Co-Supervisor
:
Dr. Ahmed Salem Ahmed Al Shehri
Added Date
:
Thursday, February 8, 2018
Researchers
Researcher Name (Arabic)
Researcher Name (English)
Researcher Type
Dr Grade
Email
دخيل الله مسلط السبيعي
Al - Subaie, Dakhil Allah Musallat
Researcher
Master
Files
File Name
Type
Description
43081.pdf
pdf
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